דף הצגת פרויקט – מס':145
תאריך:10.10.01
- אנגלית: Finite element
modeling of a MEMS filter resonator
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Technical Support manager, Bercom Ltd. |
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תואר:
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שם
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טל' נייד: |
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03-9233522(306) |
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E mail: shmulik@bercom.co.il
תאור
הפרוייקט:
The goal of this project is to characterize the
performance of a typical MEMS filter resonator for use in system simulation by
EDA (electronic design automation) tools. (This class of devices can be
configured as electromechanical filters, accelerometers and gyroscopes). To achieve this goal we need to go
threw a series of full-scale 3D simulations to extract stiffness, damping, mass
and capacitance of the device. Once these lumped quantities are calculated a
simple circuit can be built and analyzed under various operating conditions.
This process of simplification is referred to as reduced-order modeling (ROM)
The modeling steps consists of several analysis types:
1.
Structural static
analysis to find the linear stiffness of the device.
2.
Modal analysis (natural
frequencies) to find the effective mass
3.
Electrostatic analysis
to extract capacitance Vs stroke of comb – this step will allow for an
electromechanical transducer to be defined.
4.
Harmonic analysis
(sweep) of the reduced order coupled electro-mechanical circuit to find the
transfer function of the filter (input voltage to output current).
Each of these steps involves some finite element related decisions that
will be addressed such as:
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Choosing the appropriate
element type
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Accuracy of numerical
solution
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Validation of
assumptions made in the simplification process. For example, fringing effects
of the electrostatic filed – important or not?
מתודיקה:
לימוד הבעיה הפיזיקלית, בניית מודל בתוכנת אלמנט סופי מסחרית, ניתוח תוצאות.