CNT - MEMS

The integration of suspended carbon nanotubes into micron-scale silicon-based devices offers many exciting advantages in the realm of nano-scale sensing and micro- and nano-electromechanical systems (MEMS and NEMS). To realize such devices, simple fabrication schemes are needed. We have recently developed a new method to integrate carbon nanotubes into silicon-based devices by applying conventional micro-fabrication methods combined with a guided chemical vapor deposition growth of single-wall carbon nanotubes. The described procedure yields clean, long, taut and well-positioned tubes in electrical contact to conducting electrodes. The positioning, alignment and tautness of the tubes are all controlled by the structural and chemical features of the micro-fabricated substrate. As the approach described consists of common micro-fabrication and chemical vapor deposition growth procedures, it offers a viable route toward MEMS–NEMS integration and commercial utilization of carbon nanotubes as nano-electromechanical transducers.

Publications:

G. A. Karp et al., J. Micromech. Microeng, 2009

A. Ya’akobovitz, Submitted 2009

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