The
protocols below were developed with the equipment and resources available at
the Tel-Aviv University EE micro-fabrication facility.
·
SU8-50
·
SU8-2075
·
SU8-2015
·
SU8-2005
·
SU8-2002
·
S1818
(positive resist)
·
AZ 5214E
(negative resist)
·
TI35ES
(high-T negative resist)
·
E-beam
·
Mo deposition
Etch
Processes
·
RIE
·
Plasma
·
Stencil