The protocols below were developed with the equipment and resources available at the Tel-Aviv University EE micro-fabrication facility.

Optical Lithography Processes

 

·         SU8-50

·         SU8-50 2000

·         SU8-2075

·         SU8-2015

·         SU8-2005

·         SU8-2002

·         S1818 (positive resist)

·         AZ 5214E (negative resist)

·         TI35ES (high-T negative resist)

Deposition Processes

·         E-beam

·         CrAu Sputtering

·         SiO2/Si3N4 Sputtering

·         SOG (2 layers)

·         SOG (1 layer)

·         Mo deposition

 

 

Etch Processes

·         RIE

 

Soft Lithography Processes

·         Plasma

PDMS Stencils

·         Stencil

Gel Processes