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General Description |
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Objective: Adhesion of PDMS to glass, quartz, Si, SiO2. |
Author: Nimrod Biber |
Date: 12/29/2004 |
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Comments: |
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Process |
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Gas |
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Comments: 1. Plasma Device: Diener Pico Rf. 2. Strong adhesion. |
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O2 |
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Gas Pressure |
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0.26 Mbar |
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Plasma |
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RF Plasma |
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RF frequency |
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13.56 Mhz |
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RF Power |
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27 watt |
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Process Duration |
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50 sec. |
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General Description |
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