TAU – EE fablab process
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General Description |
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SOG 500 F 1 Layer |
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Objective: passivation |
Author: Itsik Kalifa |
Date: |
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Comments: |
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Process |
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Singe |
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Comments: |
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140 deg, 5 min |
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Spin |
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300 rpm/sec to 2200 rpm 40 sec |
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Bake |
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from |
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Cool down |
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from |
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Cure |
With N2 flow |
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from R.T to
from |
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General Description |
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Thickness |
0.85 mm |
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