TAU – EE fablab process
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General Description |
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SOG 500 F 2 Layers |
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Objective: passivation, |
Author: Itsik Kalifa |
Date: 23/1/2005 |
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Comments: |
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Process |
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Singe |
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Comments: |
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140 deg, 5 min |
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Spin1 |
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300 rpm/sec to 2000 rpm 40 sec |
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Bake1 |
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from |
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Cool down1 |
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from |
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Spin2 |
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300 rpm/sec to 2000 rpm 40 sec |
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Bake2 |
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from |
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Cure |
With N2 flow |
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from R.T to
from |
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General Description |
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Thickness |
2 mm |
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