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Cr/Au
evaporation |
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Objective: |
Author: Itsik Kalifa |
Date: |
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Comments: |
EDWARDS EB3 |
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Process |
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Pump |
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GUN |
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Cr evaporation |
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e-beam current |
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Tooling factor |
0.7 |
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Z-Value |
28.94 |
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Rate |
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Thickness |
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Au evaporation |
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e-beam current |
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Tooling factor |
1 |
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Z-Value |
23.17 |
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Rate |
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Thickness |
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Vacuum on evaporation |
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