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General Description |
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SU8-2075 |
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Objective: molding master |
Author: Eyal Jakobs |
Date: |
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Comments: |
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Process |
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Spin |
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Comments: Mask Aligner: 11 mW/cm2 |
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100 rpm/sec to 500 rpm 10 sec |
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300 rpm/sec to 2000 rpm 30 sec |
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Pre bake |
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65 deg 5 min |
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95 deg 20 min |
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Relax |
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4 min |
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Exposure |
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50 sec |
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Post bake |
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65 deg 1 min |
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95 deg 10 min |
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Relax |
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2.5 min |
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Develop |
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18 min in Shipley EC solvent |
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Rinse |
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IPA+Dry with Nitrogen |
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General Description |
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Thickness |
104-106 mm |
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