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General Description |
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SU8-50 |
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Objective: molding master |
Author: Yael Hanein |
Date: |
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Comments: |
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Process |
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Singe |
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Comments: Mask aligner: 11 mW/cm2 |
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170 deg, 5 min |
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Spin |
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100 rpm/sec to 500 rpm 5 sec |
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300 rpm/sec to 2000 rpm 30 sec |
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Pre bake |
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65 deg 6 min |
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95 deg 20 min |
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Relax |
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10 min |
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Exposure |
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40 sec |
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Post bake |
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65 deg 1 min |
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95 deg 5 min |
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Relax |
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10 min |
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Develop |
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7 min in SU8 developer |
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Rinse |
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IPA |
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General Description |
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Thickness |
50 mm |
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