Journal of Microwave Power and Electromagnetic Energy (JMPEE)
TITLE	A Versatile Microwave Plasma Applicator [PDF]
AUTHORS	T-R Ji and J. Gering 1988 23 1 3-10
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Abstract This paper describes a device used for the introduction of microwave energy into a plasma chamber over a wide area with high transfer efficiency and good energy uniformity. The applicator design was based on a slotted waveguide combined with a quartz window. The impedance properties were calculated for slots in the broad wall of a WR430 waveguide. Low-power simulating tests were conducted to determine the optimum geometry. A simple test system was used to measure and plot the three-dimensional spatial energy distribution.