Journal of Microwave Power and Electromagnetic Energy (JMPEE)
TITLE	Generation-Induced Plasma Source Mass Spectrometry for Elemental Analysis [PDF]
AUTHORS	K. Komachi and S. Kobayashi 1989 24 3 140-149
YEAR
VOLUME
ISSUE
PAGES
Abstract A uniform and active 2.45 GHz microwave plasma is generated with traveling waves in a large area, 180 x 300 mm^2, along a dielectric line. The brightness temperature of the Ar plasma is within 644°C ± 17°C . The electron temperature and density at 200 Pa are about 4 eV and 4 x10^11cm^3 respectively, and of the same order with those in small microwave plasma generators. The plasma area can easily be enlarged. Key Words: Microwave plasma, Brightness temperature, Traveling wave, Dielectric line, Electron temperature, Electron density