Journal of Microwave Power and Electromagnetic Energy (JMPEE)
TITLE	A Traveling-Wave Resonator for Heating Low-Resistivity Silicon Ribbons and Wafers [PDF]
AUTHORS	M. Sirkis and C. Hou 1989 24 3 177-185
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Abstract A traveling-wave resonator and applicators for heating low resistivity silicon ribbons and wafers have been studied. The performance of the microwave circuit agrees with the theoretical predictions. An applicator for 150 mm (six-inch) diameter wafers is described. Theoretical estimates of temperature distributions and some measured temperature distributions are included. Key Words: Process heating, Joule heating, Microwave heating, Semiconductor, Traveling wave resonator.