Journal of Microwave Power and Electromagnetic Energy (JMPEE)
TITLE	Slotted Waveguide Field Applicator for the Generation of Long Uniform Plasmas [PDF]
AUTHORS	G. Sauvé, M. Moisan and Z. Zakrzewski 1993 28 3 123-131
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Abstract This paper reports the experimental study of a small width, long microwave field applicator used to sustain long, axially uniform gaseous discharges as required in various applications. Based on an array of slots in the wide wall of a WR-430 waveguide, this applicator was described earlier u Ji and Gerling [1988] who performed low power simulating tests under free-space conditions. The present investigation includes low-power measurements as well as experiments in an actual discharge set-up. It is shown that even a simple structure with no adjustable elements can assure an efficient power transfer to plasma and good axial uniformity. Indication for the design and efficient use of the applicator are also given. Key Words: Microwave discharge, Plasma source, Slotted waveguide