Ellipsometer -
M-2000
(by J.A. Woollam)
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Spectra lrange |
193 to 1000 nm (505 wavelengths). |
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Rotating Compensator (RCE) |
accurate "Delta" data from 0° to 360° |
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Fast measurement speeds |
505 wavelengths measured simultaneously. Typical measurement times of a couple seconds. |
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Large thickness range capabilities |
Few angstroms to ~10 microns thick. |
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Advanced measurements |
-Anisotropic. -Mueller Matrix. -Depolarization. |
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· Automatic Angle |
45 to 90 degrees. |
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Automating sample translation & mapping |
200 mm R-theta stage. |
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Focusing probe |
beam diameter of 500 microns over all wavelengths. |
