Spin processor WS - 400
(by Laurell technologies Corp.)
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1 | PTFE Teflon, virgin grade, housing. Does not degrade or generate particles. |
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Valve actuation and lid mounted injector are included. |
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10 programs, 51 steps each |
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Real time display of all program functions. |
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Permanent EEPROM setup and program storage. |
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Digital closed loop speed control. |
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Vacuum on wafer readout and interlock. |
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Acceleration/deceleration rate programmable in every step. |
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Step time from 0.1 sec to 99 min 59.9 sec with 0.1 second step time resolution. |
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Integrated air pilot valves for controlling air actuated valves. |
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Up to 8 pilot valves per step. |
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Completely manual operation is possible as well as fully automatic mode. |
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Time, rpm, valves, and acceleration/deceleration programmable per step. |
