Academic Course Notes:
- Process interconnects etch
- Process interconnects Int and Litho
- Photolithography - introduction
- Etching - introduction
- Advanced Litho - introduction
- CVD for interconnects - applications
- CVD for interconnects - methods
- CVD for interconnects
- PECVD for interconnects
- Sputtering 2002
- Interconnect models - basics
- Interconnect models - Crosstalk and inductance
- Metallization and phase diagram
- Diffusion Barrier Layers for Cu - AMC 2000 Tutorials
- Electromigration-Part 1
- Electromigration-Part 2
- International reference process sources:
- Sputtering 2000
Lectures-Order
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Last modified: January 1999.