AdvancedTopics in VLSI Technology -From the wafer to the transistor.
I 1 Lecture 1.pdf
I 2 introduction.pdf
I 3 Characteristics of Si.pdf
I 4-1 Oxidation.pdf
I 4-2 Oxidation.pdf
I 5 ion implantation.pdf
I 6 diffusion.pdf
I 7 junctions.pdf
I 7-2 junctions .pdf
I 8-1 Lithography.pdf
I 8-2 lithography.pdf
I 9 vacuum.pdf
I 10 cvd.pdf
I 11 etching.pdf
I 12 RIE.pdf
I 13 metallization.pdf
II 1 Si Tech introduction.pdf
II 2 Si CMOS Technology.pdf
II 3 Si Wafers growth , properties.pdf
II 4 Semiconductor manufacturing.pdf
II 5 Lithography.pdf
Integrated circuit devices1.pdf
Integrated circuit devices2.pdf